• DocumentCode
    227963
  • Title

    Presheath and double layer-like structures in the core of an argon helicon plasma source with uniform magnetic fields

  • Author

    Siddiqui, M. Umair ; Hershkowitz, Noah

  • Author_Institution
    Dept. of Eng. Phys., Univ. of Wisconsin - Madison, Madison, WI, USA
  • fYear
    2014
  • fDate
    25-29 May 2014
  • Firstpage
    1
  • Lastpage
    1
  • Abstract
    Summary form only given. An argon helicon plasma source is operated at ~3 mTorr neutral pressure, 500 W RF power, and 900 G axial magnetic field strength generating plasma densities of ~1012 cm-3. A grounded plate is placed two antenna lengths down stream from the edge of the m = -1 helicon antenna. A double layer-like structure consisting of a localized axial electric field of approximately 8 V/cm over 1-2 cm is observed upstream from the grounded plate. The high potential side is shown to contain a population of relatively hot (Te ~ 10 eV) electrons. The magnitude of the potential step is shown to be enough to trap the hot electrons. The interaction between the double layer-like structure and the plate´s presheath is investigated.
  • Keywords
    antennas in plasma; argon; electron traps; helicons; plasma boundary layers; plasma density; plasma magnetohydrodynamics; plasma sheaths; plasma sources; Ar; argon helicon plasma source; axial magnetic field strength; double layer-like structures; grounded plate; helicon antenna edge; hot electron trapping; localized axial electric field; magnetic flux density 900 G; neutral pressure; plasma density generation; power 500 W; presheath-like structures; radiofrequency power; uniform magnetic fields; Antennas; Argon; Educational institutions; Electric potential; Magnetic cores; Magnetic fields; Plasma sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014 IEEE 41st International Conference on
  • Conference_Location
    Washington, DC
  • Print_ISBN
    978-1-4799-2711-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.2014.7012630
  • Filename
    7012630