DocumentCode :
227963
Title :
Presheath and double layer-like structures in the core of an argon helicon plasma source with uniform magnetic fields
Author :
Siddiqui, M. Umair ; Hershkowitz, Noah
Author_Institution :
Dept. of Eng. Phys., Univ. of Wisconsin - Madison, Madison, WI, USA
fYear :
2014
fDate :
25-29 May 2014
Firstpage :
1
Lastpage :
1
Abstract :
Summary form only given. An argon helicon plasma source is operated at ~3 mTorr neutral pressure, 500 W RF power, and 900 G axial magnetic field strength generating plasma densities of ~1012 cm-3. A grounded plate is placed two antenna lengths down stream from the edge of the m = -1 helicon antenna. A double layer-like structure consisting of a localized axial electric field of approximately 8 V/cm over 1-2 cm is observed upstream from the grounded plate. The high potential side is shown to contain a population of relatively hot (Te ~ 10 eV) electrons. The magnitude of the potential step is shown to be enough to trap the hot electrons. The interaction between the double layer-like structure and the plate´s presheath is investigated.
Keywords :
antennas in plasma; argon; electron traps; helicons; plasma boundary layers; plasma density; plasma magnetohydrodynamics; plasma sheaths; plasma sources; Ar; argon helicon plasma source; axial magnetic field strength; double layer-like structures; grounded plate; helicon antenna edge; hot electron trapping; localized axial electric field; magnetic flux density 900 G; neutral pressure; plasma density generation; power 500 W; presheath-like structures; radiofrequency power; uniform magnetic fields; Antennas; Argon; Educational institutions; Electric potential; Magnetic cores; Magnetic fields; Plasma sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Sciences (ICOPS) held with 2014 IEEE International Conference on High-Power Particle Beams (BEAMS), 2014 IEEE 41st International Conference on
Conference_Location :
Washington, DC
Print_ISBN :
978-1-4799-2711-1
Type :
conf
DOI :
10.1109/PLASMA.2014.7012630
Filename :
7012630
Link To Document :
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