Title :
An innovative Pirani pressure sensor
Author :
Chou, Bruce C S ; Shie, Jin-Shown
Author_Institution :
Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
A conventional Pirani vacuum sensor is converted into a device able to measure high gas pressure. By referring to infinite pressure, heat-loss change from the reference to a measured pressure induces electrical signal on the resistive sensor. 0.3 μm shallow gap is formed for the floating microsensors to increase its sensitivity. This results in a measurable range from 105 down to 10-1 Torr. The thermal microsensor differs from the piezoresistive or capacitive type in sensing mechanisms. It also has advantages in smaller size and simpler structure
Keywords :
electric sensing devices; elemental semiconductors; high-pressure techniques; membranes; microsensors; pressure sensors; silicon; vacuum measurement; 0.3 mum; 10E5 to 10E-1 torr; Pirani pressure sensor; Si; capacitive sensing; electrical signal; floating microsensors; gas pressure; heat-loss change; piezoresistive sensing; resistive sensor; sensitivity; shallow gap; thermal microsensor; Atmospheric measurements; Biomembranes; Electric variables measurement; Gas detectors; Microsensors; Pressure measurement; Temperature sensors; Thermal conductivity; Thermal resistance; Thermal sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635741
