• DocumentCode
    2281626
  • Title

    Fabrication and hydrogen sensing properties of doped titania nanotubes

  • Author

    Qin, Rui ; Ding, Dongyan ; Ning, Congqin ; Liu, Hegang ; Li, Ming ; Mao, Dali

  • Author_Institution
    Lab. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
  • fYear
    2010
  • fDate
    16-19 Aug. 2010
  • Firstpage
    1327
  • Lastpage
    1330
  • Abstract
    Titania nanotubes have been widely used in gas sensing applications such as hydrogen sensors. Doping titania nanotubes with other elements are expected to provide tunable band-gap and thus favorable hydrogen sensing properties. In this work, Nb, Zr-doped titania nanotube arrays in crystallized states were fabricated on alloy substrates through anodization and heat-treatment. And doped nanotube sensors were assembled on PCB. Corresponding anodization and sensor fabrication processes were investigated and hydrogen sensing properties of the nanotube sensors were tested in hydrogen atmosphere. Experimental results indicated that the content of Zr had a great impact on the growth, thermal stability and hydrogen sensing property of regular nanotube arrays. The Nb-doped nanotubes demonstrated a good hydrogen sensing performance.
  • Keywords
    anodisation; doping; energy gap; gas sensors; heat treatment; nanosensors; nanotubes; titanium compounds; PCB; TiO2:Nb,Zr; anodization; doped titania nanotube; gas sensing application; heat-treatment; hydrogen sensing properties; sensor fabrication; titania nanotube array; tunable band-gap; Metals; Nanotubes; Sensors; Substrates; Surface morphology; Thermal stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Packaging Technology & High Density Packaging (ICEPT-HDP), 2010 11th International Conference on
  • Conference_Location
    Xi´an
  • Print_ISBN
    978-1-4244-8140-8
  • Type

    conf

  • DOI
    10.1109/ICEPT.2010.5582803
  • Filename
    5582803