DocumentCode
2281626
Title
Fabrication and hydrogen sensing properties of doped titania nanotubes
Author
Qin, Rui ; Ding, Dongyan ; Ning, Congqin ; Liu, Hegang ; Li, Ming ; Mao, Dali
Author_Institution
Lab. of Microelectron. Mater. & Technol., Shanghai Jiao Tong Univ., Shanghai, China
fYear
2010
fDate
16-19 Aug. 2010
Firstpage
1327
Lastpage
1330
Abstract
Titania nanotubes have been widely used in gas sensing applications such as hydrogen sensors. Doping titania nanotubes with other elements are expected to provide tunable band-gap and thus favorable hydrogen sensing properties. In this work, Nb, Zr-doped titania nanotube arrays in crystallized states were fabricated on alloy substrates through anodization and heat-treatment. And doped nanotube sensors were assembled on PCB. Corresponding anodization and sensor fabrication processes were investigated and hydrogen sensing properties of the nanotube sensors were tested in hydrogen atmosphere. Experimental results indicated that the content of Zr had a great impact on the growth, thermal stability and hydrogen sensing property of regular nanotube arrays. The Nb-doped nanotubes demonstrated a good hydrogen sensing performance.
Keywords
anodisation; doping; energy gap; gas sensors; heat treatment; nanosensors; nanotubes; titanium compounds; PCB; TiO2:Nb,Zr; anodization; doped titania nanotube; gas sensing application; heat-treatment; hydrogen sensing properties; sensor fabrication; titania nanotube array; tunable band-gap; Metals; Nanotubes; Sensors; Substrates; Surface morphology; Thermal stability;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Packaging Technology & High Density Packaging (ICEPT-HDP), 2010 11th International Conference on
Conference_Location
Xi´an
Print_ISBN
978-1-4244-8140-8
Type
conf
DOI
10.1109/ICEPT.2010.5582803
Filename
5582803
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