Title :
Analysis of lattice-strain effects in LLL X-ray interferometers by Takagi equations
Author :
Mana, G. ; Palmisano, C. ; Zosi, G.
Author_Institution :
Ist. di Metrologia G. Colonnetti, CNR, Torino, Italy
Abstract :
The Takagi approach has been used to study whether the determination of the Si lattice parameter a/sub o/, with 10/sup -9/ relative uncertainty, is affected by lattice strains of various kind.
Keywords :
X-ray crystallography; X-ray diffraction; electromagnetic wave interferometry; elemental semiconductors; lattice constants; silicon; LLL X-ray interferometers; Si; Si lattice parameter; Takagi equations; X-ray propagation; lattice-strain effects; Atomic measurements; Capacitive sensors; Equations; Interferometers; Lattices; Measurement uncertainty; Samarium; Shape; Silicon; Surface waves;
Conference_Titel :
Precision Electromagnetic Measurements, 2002. Conference Digest 2002 Conference on
Conference_Location :
Ottawa, Ontario, Canada
Print_ISBN :
0-7803-7242-5
DOI :
10.1109/CPEM.2002.1034836
