DocumentCode
2283232
Title
Flexible stacked type actuators
Author
Tominaga, Takayuki ; Ohya, Nobuyuki ; Senda, Kouji ; Idogaki, Takaharu ; Hattori, Tadashi
fYear
1994
fDate
2-4 Oct. 1994
Firstpage
143
Abstract
Flexible stacked type actuators have been developed. The typical flexible stacked type actuator is composed of 20 sheets of PZT unimorph cells. These cells are piled vis-a-vis, and these cells are connected with a flexible rod at the edge of each cell. The electrodes are connected to one another with copper wire 50 μm in diameter. The actuator is 12 mm in diameter and 6 mm in length. The bending angle is 8 degrees with no weight and 4.5 degrees with 100 g weight when electrodes on a cell are charged with 250 V driving voltage. The laser scanning system that contains two flexible stacked type actuators and a mirror at the top of the actuator is manufactured. The laser scanning system can draw simple diagrams
Keywords
Copper; Displacement measurement; Electrodes; Joining processes; Laboratories; Mirrors; Optical device fabrication; Piezoelectric actuators; Piezoelectric materials; Wire;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Conference_Location
Nagoya, Japan
Print_ISBN
0-7803-2095-6
Type
conf
DOI
10.1109/ISMMHS.1994.512914
Filename
512914
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