DocumentCode :
2283232
Title :
Flexible stacked type actuators
Author :
Tominaga, Takayuki ; Ohya, Nobuyuki ; Senda, Kouji ; Idogaki, Takaharu ; Hattori, Tadashi
fYear :
1994
fDate :
2-4 Oct. 1994
Firstpage :
143
Abstract :
Flexible stacked type actuators have been developed. The typical flexible stacked type actuator is composed of 20 sheets of PZT unimorph cells. These cells are piled vis-a-vis, and these cells are connected with a flexible rod at the edge of each cell. The electrodes are connected to one another with copper wire 50 μm in diameter. The actuator is 12 mm in diameter and 6 mm in length. The bending angle is 8 degrees with no weight and 4.5 degrees with 100 g weight when electrodes on a cell are charged with 250 V driving voltage. The laser scanning system that contains two flexible stacked type actuators and a mirror at the top of the actuator is manufactured. The laser scanning system can draw simple diagrams
Keywords :
Copper; Displacement measurement; Electrodes; Joining processes; Laboratories; Mirrors; Optical device fabrication; Piezoelectric actuators; Piezoelectric materials; Wire;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Conference_Location :
Nagoya, Japan
Print_ISBN :
0-7803-2095-6
Type :
conf
DOI :
10.1109/ISMMHS.1994.512914
Filename :
512914
Link To Document :
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