• DocumentCode
    2283232
  • Title

    Flexible stacked type actuators

  • Author

    Tominaga, Takayuki ; Ohya, Nobuyuki ; Senda, Kouji ; Idogaki, Takaharu ; Hattori, Tadashi

  • fYear
    1994
  • fDate
    2-4 Oct. 1994
  • Firstpage
    143
  • Abstract
    Flexible stacked type actuators have been developed. The typical flexible stacked type actuator is composed of 20 sheets of PZT unimorph cells. These cells are piled vis-a-vis, and these cells are connected with a flexible rod at the edge of each cell. The electrodes are connected to one another with copper wire 50 μm in diameter. The actuator is 12 mm in diameter and 6 mm in length. The bending angle is 8 degrees with no weight and 4.5 degrees with 100 g weight when electrodes on a cell are charged with 250 V driving voltage. The laser scanning system that contains two flexible stacked type actuators and a mirror at the top of the actuator is manufactured. The laser scanning system can draw simple diagrams
  • Keywords
    Copper; Displacement measurement; Electrodes; Joining processes; Laboratories; Mirrors; Optical device fabrication; Piezoelectric actuators; Piezoelectric materials; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
  • Conference_Location
    Nagoya, Japan
  • Print_ISBN
    0-7803-2095-6
  • Type

    conf

  • DOI
    10.1109/ISMMHS.1994.512914
  • Filename
    512914