Title :
Development of ceramic nano-porous materials
Abstract :
Silicon nitride porous materials are developed by organic precursor technique. Polysilazane is used as ceramic precursor. Compound granules of silicon nitride powder and polysilazane are pressed and CIPed to make green bodies and then fired. The content of polysilazane and sintering temperature are changed to control pore size. As the results, the pore diameter can be controlled from ten nanometer to micrometer by changing sintering temperature, if the polysilazane content is enough
Keywords :
Ceramics; Intelligent actuators; Intelligent sensors; Machine intelligence; Nanostructured materials; Organic materials; Powders; Silicon; Temperature distribution; Temperature sensors;
Conference_Titel :
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Conference_Location :
Nagoya, Japan
Print_ISBN :
0-7803-2095-6
DOI :
10.1109/ISMMHS.1994.512918
