Title :
Lattice spacing mapping in large silicon ingot using high resolution lattice comparator
Author :
Fujimoto, H. ; Waseda, A. ; Xiaowei, Z. ; Nakayama, K. ; Fujii, Kenichi ; Sugiyama, H. ; Ando, M.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Nat. Metrol. Inst. of Japan, Tsukuba, Japan
Abstract :
Highly pure silicon crystal is used to determine the Avogadro constant through the XRCD method (K. Fujii et al, Metrologia (France), vol. 36, no. 5, pp. 455-64, 1999). In the method, unit cell volume and molar volume has to be measured using standard samples made from an ingot. In this paper, a method of fast lattice spacing mapping in large silicon crystals is described. Resolution of 0.02 ppm is obtained with a measuring time of 5 minutes per point. Measuring time reduction is estimated to be feasible by simple modification of the measurement. The efficacy of this method is discussed.
Keywords :
constants; crystal structure; lattice constants; silicon; volume measurement; 5 min; Si; XRCD method Avogadro constant determination; high resolution lattice comparators; highly pure silicon crystals; large silicon ingots; lattice spacing mapping; molar volume measurement; unit cell volume measurement; Energy resolution; Lattices; Optical interferometry; Photonic crystals; Silicon; Strontium; Testing; Time measurement; Volume measurement; Wavelength measurement;
Conference_Titel :
Precision Electromagnetic Measurements, 2002. Conference Digest 2002 Conference on
Conference_Location :
Ottawa, Ontario, Canada
Print_ISBN :
0-7803-7242-5
DOI :
10.1109/CPEM.2002.1034842
