Consideration on the accuracy of fabricating microstructures using UV laser induced polymerization

This study details the fabrication of micromolds using three different methods. The first method is mask-based method in which an image is transferred to the photopolymer layer by irradiating a UV laser through a patterned mask. In the second and third methods, patterning is done by irradiating a shaped and focused UV laser beam onto the photopolymer which is set on an X-Y table. The desired pattern is then obtained by moving the X-Y table. The accuracy of the solidified polymer when using these methods is examined. These methods produce micro-molds of various shapes and lateral dimensions with high aspect ratio (height/width)