Non-resonant electrostatic energy harvesting from a rolling mass

Energy harvesting devices typically have a resonance frequency at which optimum power transduction is achieved. This is impractical for power sources with low or broad frequency ranges, such as human motion. Previously, a novel, non-resonant electrostatic energy harvesting device was proposed, using an external proof mass in the form of a rolling cylinder. Substrate parasitic capacitance was identified as a key issue for successful device operation. In this paper, a new fabrication method is presented. Parasitic capacitance effects are reduced using glass instead of silicon as a substrate. A scalable fabrication technique for contact-to-dielectric alignment below 100 nm using electrodeposition was developed. Initial devoce characterization shows output power for the first time, with some voltage gain. Further improvements on the fabrication and characterization techniques are proposed which may lead to consistent, non-resonant power transduction from human body motion or other power sources. Implementation concepts are outlined.