Title :
Decoding algorithm for interference patterns in phase shifting interferometry without a priori shift knowledge
Author :
Guzhov, V.I. ; Ilinykh, S.P. ; Haydukov, D.S. ; Kuznetzov, R.A.
Author_Institution :
Department of Computing Science, Novosibirsk State Technical University, Novosibirsk Russia
Abstract :
Interferogram´s decoding methods based on the step-by-step shift are widely used in creation of interference measuring systems. The phase-shifting method is based on obtaining several interferograms when the phase of reference wave is changed to known values. Accuracy of existing decoding algorithms depends on a setting of values of inserted phase shifts. However, it is difficult to determine an exact value of the phase shift in practice because of errors of devices performing a phase shift. In this paper an algorithm based on the step phase-shifting without a priori knowledge of phase shift is considered. This algorithm uses three interferograms obtained with arbitrary phase shifts.
Keywords :
interference (wave); measurement errors; measurement systems; phase shifting interferometry; arbitrary phase shifts; interference measuring systems; interference patterns; interferogram decoding methods; phase shifting interferometry; reference wave phase; step phase-shifting method; step-by-step shift; Accuracy; Decoding; Interference; Phase measurement; Phase shifting interferometry; Trajectory; Vectors; decoding algorithm; interference measuring system; interferometry;
Conference_Titel :
Strategic Technology (IFOST), 2012 7th International Forum on
Conference_Location :
Tomsk
Print_ISBN :
978-1-4673-1772-6
DOI :
10.1109/IFOST.2012.6357647