DocumentCode :
2283908
Title :
Nanowire-based 2-D and 3-D XoY electronics
Author :
Kapadia, Rehan ; Takei, Kuniharu ; Takahashi, Toshitake ; Ruebusch, Daniel ; Javey, Ali
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California at Berkeley, Berkeley, CA, USA
fYear :
2010
fDate :
17-20 Aug. 2010
Firstpage :
37
Lastpage :
40
Abstract :
The authors discuss the 3-D and 2-D X-on-Y (XoY) assembly techniques, utilizing specific examples to illustrate the potential of these methods for the fabrication of high performance devices on arbitrary substrates. For fabrication of 3-D structures, a templated nanomaterial growth technique is used. Specifically, anodic aluminum oxide (AAO) is used as the growth template. Alternatively, for 2-D assembly, a nanomaterial transfer process is used, where the nanostructures are first grown on a convenient growth substrate, and then deterministically placed on a substrate of choice using photolithography in conjunction with a printing process. 2-D and 3-D XoY assembly and integration of nanostructured materials are demonstrated for electronics, sensing, and energy applications. The presented devices illustrate the versatility and potential of XoY techniques for the fabrication of a large array of high performance devices on flexible and low-cost substrates.
Keywords :
aluminium compounds; flexible electronics; integrated circuit technology; nanoelectronics; nanofabrication; nanolithography; nanowires; semiconductor materials; semiconductor quantum wires; substrates; 2D assembly technique; 2D integration; 3D XoY electronics; 3D assembly technique; 3D integration; 3D structures; AlO; anodic aluminum oxide; growth template; low-cost flexible substrate; nanomaterial transfer process; nanowire-based 2D XoY electronics; photolithography; printing process; single crystalline semiconductor materials; templated nanomaterial growth;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location :
Seoul
ISSN :
1944-9399
Print_ISBN :
978-1-4244-7033-4
Electronic_ISBN :
1944-9399
Type :
conf
DOI :
10.1109/NANO.2010.5697725
Filename :
5697725
Link To Document :
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