Title :
Proceedings of 1993 IEEE International SOI Conference
Abstract :
The following topics were dealt with: materials processing; materials characterization; device physics; device processing and characterization; device modeling; device and circuit reliability; advanced circuits
Keywords :
CMOS integrated circuits; SIMOX; circuit reliability; insulated gate field effect transistors; integrated circuit technology; reliability; semiconductor device models; semiconductor-insulator boundaries; silicon; CMOS; MOSFET; SIMOX; SOI; advanced circuits; circuit reliability; device modeling; device physics; device processing; device reliability; materials characterization; materials processing;
Conference_Titel :
SOI Conference, 1993. Proceedings., 1993 IEEE International
Conference_Location :
Palm Springs, CA, USA
Print_ISBN :
0-7803-1346-1
DOI :
10.1109/SOI.1993.344615
