Nanoassembly of pH sensor nanoprobe by mutiple-metallic nanowires

Author

Yang, Zhan ; Nakajima, Masahiro ; Ode, Yasihito ; Fukuda, Toshio

Author_Institution

Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Nagoya, Japan

fYear

2010

fDate

17-20 Aug. 2010

Firstpage

352

Lastpage

355

Abstract

This paper presets the assembly of a nanowire probe pH sensor. An AFM cantilever was used for electrodes of the device and etched by FIB. Two carbon nanotubes (CNT) were assembled to the separated electrodes of AFM cantilever. A tungsten probe is etched by focused ion beam (FIB) into 300 nm in diameter and 25.4 μm in length. Then the probe is coated by parylene and cut the tip to open the tungsten. A tungsten nanowire is used for work electrode and a platinum nanowire is used for counter electrode. The nanowires were fabricated via field emission method by introducing hexacabonyl tungsten and trimethyl cyclopentadienyl platinum individually inside a field emission electron microscope.

Keywords

bioMEMS; biochemistry; carbon nanotubes; electrochemical electrodes; electrochemical sensors; field emission electron microscopy; focused ion beam technology; microelectrodes; nanofabrication; nanosensors; nanowires; organic compounds; pH measurement; platinum; probes; sputter etching; tungsten; AFM cantilever electrodes; C-W-Pt; FIB etching; carbon nanotubes; counter electrode; electrochemical detection; field emission electron microscope; field emission fabrication method; focused ion beam etching; hexacabonyl tungsten; multiple-metallic nanowires; nanoassembly; pH sensor nanoprobe; parylene coating; platinum nanowire; single cell pH value measurement; trimethyl cyclopentadienyl platinum; tungsten nanowire; tungsten probe; work electrode;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on

Conference_Location

Seoul

ISSN

1944-9399

Print_ISBN

978-1-4244-7033-4

Electronic_ISBN

1944-9399

Type

conf

DOI

10.1109/NANO.2010.5697763

Filename

5697763