Title :
A 15 b electromechanical sigma-delta converter for acceleration measurements
Author :
Smith, T. ; Nys, O. ; Chevroulet, M. ; DeCoulon, Y. ; Degrauwe, M.
Author_Institution :
Swiss Center for Electron. & Microtechnol. Inc., Neuchatel, Switzerland
Abstract :
Precision accelerometers for applications such as inertial navigation and guidance, tilt measurement and low-level vibration monitoring can be characterized by shown specifications . Drawbacks of classical electromagnetic servo-accelerometers (fabrication cost, power consumption and shock resistance) are overcome by using a bulk micromachined capacitive accelerometer and a CMOS interface circuit.<>
Keywords :
CMOS integrated circuits; acceleration measurement; accelerometers; analogue-digital conversion; delta modulation; electromechanical effects; inertial navigation; vibration measurement; CMOS interface circuit; acceleration measurements; bulk micromachined capacitive accelerometer; electromagnetic servo-accelerometers; electromechanical sigma-delta converter; fabrication cost; guidance; inertial navigation; low-level vibration monitoring; power consumption; precision accelerometers; shock resistance; tilt measurement; Acceleration; Accelerometers; Costs; Delta-sigma modulation; Electrical resistance measurement; Electromagnetic measurements; Fabrication; Inertial navigation; Monitoring; Vibration measurement;
Conference_Titel :
Solid-State Circuits Conference, 1994. Digest of Technical Papers. 41st ISSCC., 1994 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-1844-7
DOI :
10.1109/ISSCC.1994.344687
