Systematic calibration of process simulators for predictive TCAD

This paper demonstrates a methodology for systematic calibration of models in process simulators and its impact on improvement of accuracy and predictive capability of a TCAD system. A software tool for calibration with numerical optimization has been developed and used to calibrate a transient enhanced diffusion (TED) model under low-dose implantation conditions. Using the calibrated model, predictive simulations were performed prior to SIMS measurements. The systematic calibration and its validation through independent experiments showed significantly improved accuracy and predictive capability of process and device simulation system.