Title :
Novel Circuit-Level Model for Gate Oxide Short and its Testing Method in SRAMs
Author :
Chen-Wei Lin ; Chao, Mango C.-T ; Chih-Chieh Hsu
Author_Institution :
Dept. of Electron. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan
Abstract :
Gate oxide short (GOS) has become a common defect for advanced technologies as the gate oxide thickness of a MOSFET is greatly reduced. The behavior of a GOS-impacted MOSFET is, however, complicated and difficult to be accurately modeled at the circuit level. In this paper, we first build a golden model of a GOS-impacted MOSFET by using technology CAD, and identify the limitation and inaccuracy of the previous GOS models. Next, we propose a novel circuit-level GOS model which provides a higher accuracy of its dc characteristics than any of the previous models and being is able to represent a minimum-size GOS-impacted MOSFET. In addition, the proposed model can fit the transient characteristics of a GOS by considering the capacitance change of the GOS-impacted MOSFET, which has not been discussed in previous work. Last, we utilize our proposed GOS model to develop a novel GOS test method for SRAMs, which can effectively detect the GOS defects usually escaped from the conventional IDDQ test and March test.
Keywords :
MOSFET; SRAM chips; semiconductor device models; technology CAD (electronics); GOS-impacted MOSFET; IDDQ test; March test; SRAM; circuit level; circuit-level model; dc characteristics; gate oxide short; golden model; technology CAD; transient characteristics; Defect modeling; SRAM; gate-oxide short; testing; testing.;
Journal_Title :
Very Large Scale Integration (VLSI) Systems, IEEE Transactions on
DOI :
10.1109/TVLSI.2013.2268984