Title :
Analysis of Nonlinearities in Force-to-Voltage Conversion in Vibratory Microgyroscope
Author :
Niu, Shaohua ; Gao, Shiqiao
Author_Institution :
Sch. of Mechatronical Eng., Beijing Inst. of Technol., Beijing, China
Abstract :
At present, the MEMS vibratory gyroscope is an extensively researched MEMS sensor. The vibratory gyroscope is used to measure the angular velocity of object, which is based on Coriolis effect. According to the working principle of this kind of gyroscope, the force to voltage is an important part conversion for realizing the role of the gyro. In the paper, we analyze the nonlinearities in force-to-voltage conversion, and conclude that the mechanical quadrature signal can form the limiting factor for the overall accuracy of the system.
Keywords :
angular velocity measurement; gyroscopes; microsensors; vibrations; Coriolis effect; MEMS sensor; MEMS vibratory gyroscope; angular velocity; force-to-voltage conversion; mechanical quadrature signal; microgyroscope nonlinearities; vibratory microgyroscope; Angular velocity; Circuits; Drives; Force control; Force measurement; Gyroscopes; Micromechanical devices; Rotation measurement; Velocity measurement; Vibration measurement; MEMS; force-to-voltage conversion; mechanical quadrature; nonlinearities; synchronous demodulation; vibratory microgyroscope;
Conference_Titel :
Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on
Conference_Location :
Changsha City
Print_ISBN :
978-1-4244-5001-5
Electronic_ISBN :
978-1-4244-5739-7
DOI :
10.1109/ICMTMA.2010.59
