Title :
Surface identification using angle resolved light scatter measurements
Author :
Rinder, T. ; Rothe, H.
Author_Institution :
Univ. of the Federal Armed Forces, Hamburg, Germany
Abstract :
Observing the light scattered back from an illuminated surface is a fast and non-contact method to characterize surface microtopography. It is very largely applied in semiconductor industry by using goniometers. This paper deals with surface microtopography identification based on angle resolved light scatter measurements using neural pattern recognition methods and a very fast calibrated scatter sensor for the purpose of automated surface inspection in precision engineering
Keywords :
automatic optical inspection; goniometers; neural nets; pattern classification; pattern recognition; angle resolved light scatter; automated surface inspection; neural pattern recognition; non-contact method; precision engineering; surface identification; surface microtopography; surface microtopography identification; Force measurement; Light scattering; Optical polarization; Optical scattering; Optical sensors; Optical surface waves; Rayleigh scattering; Sensor arrays; Surface topography; Surface waves;
Conference_Titel :
Neural Networks, 2000. IJCNN 2000, Proceedings of the IEEE-INNS-ENNS International Joint Conference on
Conference_Location :
Como
Print_ISBN :
0-7695-0619-4
DOI :
10.1109/IJCNN.2000.859374
