Title :
Transfer technology for fabrication of flexible OTFT backplane
Author :
Yamamoto, Toshihiro ; Fujisaki, Yoshihide ; Kinoshita, Akihiro ; Takei, Tatsuya ; Furukawa, Tadahiro ; Fujikake, Hideo ; Nakajima, Yoshiki ; Hosoi, Masayuki
Author_Institution :
Japan Broadcasting Corp. (NHK), Tokyo, Japan
Abstract :
A new transfer technology to realize flexible organic thin film transistors (OTFTs) on a plastic substrate has been developed. The basic principle of the proposed method is that all the fabrication processes for the OTFT array on glass substrate have been completed, and the OTFT is then transferred onto the plastic film. A 5.8-inch diagonal wide-QQVGA OTFT array was fabricated using this technology. We confirmed that degree of substrate deformation with the proposed technology could be suppressed in comparison with that with conventional direct formation method, and also that no significant degradation in the electrical characteristics of the OTFT was observed as a result of the transfer process. It is thought that this will be a key technology for the fabrication of large flexible displays with TFT backplanes.
Keywords :
deformation; organic semiconductors; thin film transistors; OTFT array; OTFT electrical characteristics; diagonal wide-QQVGA OTFT array; flexible OTFT backplane; flexible organic thin film transistors; glass substrate; plastic film; plastic substrate; size 5.8 inch; substrate deformation; transfer technology; Electrodes; Etching; Heat transfer; Organic light emitting diodes; Organic thin film transistors; Deformation rate; Flexible display; Low temperature fabrication; Manufacturing processes; Organic light emitting diodes; Organic thin film transistor; Plastic film; Transfer method;
Conference_Titel :
Industry Applications Society Annual Meeting (IAS), 2011 IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4244-9498-9
DOI :
10.1109/IAS.2011.6074361