• DocumentCode
    2287178
  • Title

    Fabrication of Nano-scale Conductors by Selective Femtosecond Laser Sintering of Metal Nanoparticles

  • Author

    Son, Yong ; Lim, Tae Woo ; Yeo, Junyeob ; Ko, Seung Hwan ; Yang, Dong-Yol

  • Author_Institution
    Sch. of Mech. Eng. & Aerosp. Syst., KAIST, Daejeon, South Korea
  • fYear
    2010
  • fDate
    17-20 Aug. 2010
  • Firstpage
    390
  • Lastpage
    393
  • Abstract
    For various applications in electronic devices, metal nanopatterns fabrication on various substrates, such as glass and flexible polymers has become important. Recently, selective laser sintering of nanomaterials has emerged as a promising approach to the fabrication of precise metal nanopatterns without using any conventional vacuum deposition or photolithography. In this study, we present the experimental results on the fabrication of subwavelength scale silver nanopatterns using a femtosecond laser for the first time. By applying a femtosecond laser for the selective sintering of metal nanoparticles on a heat sensitive substrate, the heat-affected zone during the laser sintering process can be minimized. Through this work, metal conductors with nanometer features and a high conductivity were successfully fabricated.
  • Keywords
    electrical conductivity; high-speed optical techniques; laser sintering; nanoelectronics; nanofabrication; nanoparticles; nanopatterning; silver; Ag; heat sensitive substrate; high conductivity metal conductors; metal nanoparticles; nanoscale conductor fabrication; selective femtosecond laser sintering; subwavelength scale silver nanopatterns;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
  • Conference_Location
    Seoul
  • ISSN
    1944-9399
  • Print_ISBN
    978-1-4244-7033-4
  • Electronic_ISBN
    1944-9399
  • Type

    conf

  • DOI
    10.1109/NANO.2010.5697903
  • Filename
    5697903