DocumentCode
2287178
Title
Fabrication of Nano-scale Conductors by Selective Femtosecond Laser Sintering of Metal Nanoparticles
Author
Son, Yong ; Lim, Tae Woo ; Yeo, Junyeob ; Ko, Seung Hwan ; Yang, Dong-Yol
Author_Institution
Sch. of Mech. Eng. & Aerosp. Syst., KAIST, Daejeon, South Korea
fYear
2010
fDate
17-20 Aug. 2010
Firstpage
390
Lastpage
393
Abstract
For various applications in electronic devices, metal nanopatterns fabrication on various substrates, such as glass and flexible polymers has become important. Recently, selective laser sintering of nanomaterials has emerged as a promising approach to the fabrication of precise metal nanopatterns without using any conventional vacuum deposition or photolithography. In this study, we present the experimental results on the fabrication of subwavelength scale silver nanopatterns using a femtosecond laser for the first time. By applying a femtosecond laser for the selective sintering of metal nanoparticles on a heat sensitive substrate, the heat-affected zone during the laser sintering process can be minimized. Through this work, metal conductors with nanometer features and a high conductivity were successfully fabricated.
Keywords
electrical conductivity; high-speed optical techniques; laser sintering; nanoelectronics; nanofabrication; nanoparticles; nanopatterning; silver; Ag; heat sensitive substrate; high conductivity metal conductors; metal nanoparticles; nanoscale conductor fabrication; selective femtosecond laser sintering; subwavelength scale silver nanopatterns;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location
Seoul
ISSN
1944-9399
Print_ISBN
978-1-4244-7033-4
Electronic_ISBN
1944-9399
Type
conf
DOI
10.1109/NANO.2010.5697903
Filename
5697903
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