DocumentCode :
2287178
Title :
Fabrication of Nano-scale Conductors by Selective Femtosecond Laser Sintering of Metal Nanoparticles
Author :
Son, Yong ; Lim, Tae Woo ; Yeo, Junyeob ; Ko, Seung Hwan ; Yang, Dong-Yol
Author_Institution :
Sch. of Mech. Eng. & Aerosp. Syst., KAIST, Daejeon, South Korea
fYear :
2010
fDate :
17-20 Aug. 2010
Firstpage :
390
Lastpage :
393
Abstract :
For various applications in electronic devices, metal nanopatterns fabrication on various substrates, such as glass and flexible polymers has become important. Recently, selective laser sintering of nanomaterials has emerged as a promising approach to the fabrication of precise metal nanopatterns without using any conventional vacuum deposition or photolithography. In this study, we present the experimental results on the fabrication of subwavelength scale silver nanopatterns using a femtosecond laser for the first time. By applying a femtosecond laser for the selective sintering of metal nanoparticles on a heat sensitive substrate, the heat-affected zone during the laser sintering process can be minimized. Through this work, metal conductors with nanometer features and a high conductivity were successfully fabricated.
Keywords :
electrical conductivity; high-speed optical techniques; laser sintering; nanoelectronics; nanofabrication; nanoparticles; nanopatterning; silver; Ag; heat sensitive substrate; high conductivity metal conductors; metal nanoparticles; nanoscale conductor fabrication; selective femtosecond laser sintering; subwavelength scale silver nanopatterns;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Nanotechnology (IEEE-NANO), 2010 10th IEEE Conference on
Conference_Location :
Seoul
ISSN :
1944-9399
Print_ISBN :
978-1-4244-7033-4
Electronic_ISBN :
1944-9399
Type :
conf
DOI :
10.1109/NANO.2010.5697903
Filename :
5697903
Link To Document :
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