Fabrication of thin film piezoelectric ultrasonic transducer

This paper presents the fabrication, and testing results of a MEMS ultrasonic transducer, based on thin film PZT membrane. The PZT structure enables the actuation and the sensing of the ultrasonic waves. The transducer was tested for impedance characteristics, fundamental resonance modes. This work shows the potential of thin film PZT for ultrasonic imaging transducers. The novel microfabrication process minimizes the size of the transducers, the spacing between the individual devices while minimizing the cross talk. The use of the PZT allows for maximum sensitivity. A two-dimensional array, like the one demonstrated in this work can be potentially used for coronary artery imaging