DocumentCode :
2291429
Title :
BEAM SWITCH TUBE MODULATOR TECHNOLOGY FOR PLASMA ION IMPLANTATION BROAD INDUSTRIAL APPLICATIONS
Author :
Deb, Dipten ; Siambis, John ; Symons, Robert ; Genovese, Joe
Volume :
1
fYear :
1993
fDate :
21-23 June 1993
Firstpage :
333
Keywords :
Ion implantation; Optical modulation; Particle beams; Plasma accelerators; Plasma applications; Plasma immersion ion implantation; Plasma properties; Plasma temperature; Sputtering; Switches;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
Conference_Location :
Albuquerque, NM, USA
Print_ISBN :
0-7803-1415-8
Type :
conf
DOI :
10.1109/PPC.1993.513344
Filename :
513344
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2291429
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