• DocumentCode
    2291429
  • Title

    BEAM SWITCH TUBE MODULATOR TECHNOLOGY FOR PLASMA ION IMPLANTATION BROAD INDUSTRIAL APPLICATIONS

  • Author

    Deb, Dipten ; Siambis, John ; Symons, Robert ; Genovese, Joe

  • Volume
    1
  • fYear
    1993
  • fDate
    21-23 June 1993
  • Firstpage
    333
  • Keywords
    Ion implantation; Optical modulation; Particle beams; Plasma accelerators; Plasma applications; Plasma immersion ion implantation; Plasma properties; Plasma temperature; Sputtering; Switches;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Pulsed Power Conference, 1993. Digest of Technical Papers., Ninth IEEE International
  • Conference_Location
    Albuquerque, NM, USA
  • Print_ISBN
    0-7803-1415-8
  • Type

    conf

  • DOI
    10.1109/PPC.1993.513344
  • Filename
    513344
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2291429