DocumentCode
2291714
Title
Design and fabrication of SOI-based MEMS for mechanical memory storage
Author
Parent, A. ; Tassetti, C.-M. ; Haussy, J. ; Tissot, A.
Author_Institution
CEA, DAM, Arpajon, France
fYear
2009
fDate
5-8 Oct. 2009
Firstpage
1
Lastpage
2
Abstract
This paper presents the design and fabrication of SOI-based MEMS for mechanical memory storage (theoretical analysis and FEM) dedicated to reliability irradiative study. The memory data is the position of a mechanical ldquobi-stablerdquo. The data is written with thermal actuators and read with electrostatic comb electrodes.
Keywords
actuators; electrodes; finite element analysis; micromechanical devices; reliability; silicon-on-insulator; FEM; SOI-based MEMS design; SOI-based MEMS fabrication; electrostatic comb electrodes; mechanical bistable position; mechanical memory storage; reliability irradiative study; theoretical analysis; thermal actuators; Electrodes; Electrostatic actuators; Extremities; Fabrication; Memory; Microelectromechanical devices; Micromechanical devices; Reliability theory; Shape; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference, 2009 IEEE International
Conference_Location
Foster City, CA
ISSN
1078-621X
Print_ISBN
978-1-4244-4256-0
Electronic_ISBN
1078-621X
Type
conf
DOI
10.1109/SOI.2009.5318777
Filename
5318777
Link To Document