DocumentCode
2296945
Title
Design and Fabrication of High-Temperature SOI Strain-Gauges
Author
Kulha, P. ; Boura, A. ; Husak, M. ; Mikulik, P. ; Kucera, M. ; Valenda, S.
Author_Institution
Dept. of Microelectron., Czech Tech. Univ. in Prague Tech., Prague
fYear
2008
fDate
12-16 Oct. 2008
Firstpage
175
Lastpage
178
Abstract
The following paper introduces the coventor ware design environment for SOI based piezoresistive sensor design. Fabrication process and characterization of designed sensors is also presented. The software package Coventor Ware has been used for design of mechanical and electrical characteristics of the structure. The tools enable design, modelling and successive modification of designed MEMS structures. The program enables: drawing of 2D layout and its editing, simulation of production process, generation of 3D model from 2D masks, generation of network by the method offinite elements, solution of mechanical, piezoresistive, thermal and further simulations. Simple passive elements (strain sensitive resistors - piezoresistors) were fabricated on SIMOX SOI substrates with sputtered AlCuSi metallization. Basic parameter extraction and their temperature dependence were performed.
Keywords
finite element analysis; microsensors; piezoresistive devices; silicon-on-insulator; strain gauges; 2D layout; AlCuSi metallization; CoventorWare design; MEMS structures; SIMOX SOI substrates; finite element method; high-temperature SOI strain-gauges; parameter extraction; piezoresistive sensor design; strain sensitive resistors; Capacitive sensors; Electric variables; Fabrication; Mechanical sensors; Micromechanical devices; Piezoresistance; Production; Resistors; Sensor phenomena and characterization; Software packages;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Devices and Microsystems, 2008. ASDAM 2008. International Conference on
Conference_Location
Smolenice
Print_ISBN
978-1-4244-2325-5
Electronic_ISBN
978-1-4244-2326-2
Type
conf
DOI
10.1109/ASDAM.2008.4743310
Filename
4743310
Link To Document