Design of the Optical Fiber MEMS Infrasound Sensor

Author

Jiang Bingli ; Yang Kuntao ; Wang Jiangan

Author_Institution

Coll. of Optoelectron. Sci. & Eng., Huazhong Univ. of Sci. & Technol., Wuhan, China

Volume

1

fYear

2010

fDate

13-14 March 2010

Firstpage

1049

Lastpage

1051

Abstract

An optical fiber infrasound sensor based on Microelectromechanical System (MEMS) is designed in this paper. Static performance of several sizes of membranes which are the core elements of the infrasound sensor are simulated with Finite Element modeling, and the results of strain gradients are shown. The relation expression between displacement of membrane and light intensity is deduced. The value of every parameter which will be used during the sensor fabrication through numerical simulation is ascertained, such as the radius of optical fiber, the membrane thickness, the size of membrane.

Keywords

acousto-optical devices; fibre optic sensors; finite element analysis; membranes; micromechanical devices; finite element modeling; light intensity; membrane thickness; microelectromechanical system; optical fiber MEMS infrasound sensor; sensor fabrication; strain gradients; Biomembranes; Capacitive sensors; Finite element methods; Microelectromechanical systems; Micromechanical devices; Optical design; Optical fiber sensors; Optical fibers; Optical sensors; Sensor systems; Electro-Optical Technolog; MOEMS; infrasound sensor; intensity modulatio;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on

Conference_Location

Changsha City

Print_ISBN

978-1-4244-5001-5

Electronic_ISBN

978-1-4244-5739-7

Type

conf

DOI

10.1109/ICMTMA.2010.334

Filename

5459675