Modeling and analysis of a maglev vibration isolation unit using rectangle Halbach permanent magnet array

A maglev vibration isolation unit (MVIU) using rectangle Halbach permanent magnet array used for ultra-precision equipment and instruments vibration isolation is proposed in this paper. The structure and operation principle of this maglev vibration isolation unit are introduced. Analytical solutions to determine the field of the maglev vibration isolation unit are deduced. The correctness of the solutions is validated by comparison of the results obtained by analytic method and by finite element method. Based on the analytic solutions, the magnetic force and natural frequency of the maglev vibration isolation unit is also deduced in this paper.