A low voltage, large scan angle MEMS micromirror array with hidden vertical comb-drive actuators for WDM routers

Author

Hah, Dooyoung ; Huang, Sophia ; Nguyen, Hung ; Chang, Hsin ; Wu, Ming C. ; Toshiyoshi, Hiroshi

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

fYear

2002

fDate

17-22 Mar 2002

Firstpage

92

Lastpage

93

Abstract

A MEMS micromirror array with hidden vertical comb-drive actuator and springs has been successfully demonstrated. The devices were fabricated using SUMMiT-V process. The fabricated micromirror showed large optical scan angle (24°) and low actuation voltage (9 V). The fill-factor of the micromirror array was as high as 91%. Applications of the micromirror array for WDM routers are also discussed.

Keywords

actuators; micro-optics; micromechanical devices; mirrors; optical arrays; optical communication equipment; telecommunication network routing; 9 V; SUMMiT-V process; WDM routers; hidden vertical comb-drive actuator; large optical scan angle; low actuation voltage; low voltage large scan angle MEMS micromirror array; micromirror; micromirror array; springs; Actuators; Fingers; Low voltage; Micromechanical devices; Micromirrors; Mirrors; Optical add-drop multiplexers; Optical fiber networks; Springs; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002

Print_ISBN

1-55752-701-6

Type

conf

DOI

10.1109/OFC.2002.1036226

Filename

1036226