• DocumentCode
    2299612
  • Title

    Ultra-compact intra-cavity contacts for multi-terminal VCSEL power enhancement

  • Author

    Lin, Chin-Han ; Thibeault, Brian J. ; Zheng, Yan ; Parker, John S. ; Rodwell, Mark J W ; Coldren, Larry A.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
  • fYear
    2012
  • fDate
    23-27 Sept. 2012
  • Firstpage
    116
  • Lastpage
    117
  • Abstract
    We demonstrate ultra-compact intra-cavity contacts fabricated with an embedded Al2O3 etch-stop, which effectively shorten the cavity length and enhance the output power of a multi-terminal VCSEL.
  • Keywords
    etching; laser cavity resonators; surface emitting lasers; Al2O3; cavity length; embedded etch stop; multiterminal VCSEL power enhancement; ultracompact intracavity contacts; Aluminum oxide; Apertures; Cavity resonators; Gallium arsenide; Oxidation; Power generation; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2012 IEEE
  • Conference_Location
    Burlingame, CA
  • Print_ISBN
    978-1-4577-0731-5
  • Type

    conf

  • DOI
    10.1109/IPCon.2012.6358516
  • Filename
    6358516
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2299612