Title :
Ultra-compact intra-cavity contacts for multi-terminal VCSEL power enhancement
Author :
Lin, Chin-Han ; Thibeault, Brian J. ; Zheng, Yan ; Parker, John S. ; Rodwell, Mark J W ; Coldren, Larry A.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, Santa Barbara, CA, USA
Abstract :
We demonstrate ultra-compact intra-cavity contacts fabricated with an embedded Al2O3 etch-stop, which effectively shorten the cavity length and enhance the output power of a multi-terminal VCSEL.
Keywords :
etching; laser cavity resonators; surface emitting lasers; Al2O3; cavity length; embedded etch stop; multiterminal VCSEL power enhancement; ultracompact intracavity contacts; Aluminum oxide; Apertures; Cavity resonators; Gallium arsenide; Oxidation; Power generation; Vertical cavity surface emitting lasers;
Conference_Titel :
Photonics Conference (IPC), 2012 IEEE
Conference_Location :
Burlingame, CA
Print_ISBN :
978-1-4577-0731-5
DOI :
10.1109/IPCon.2012.6358516