Modeling and Simulation of Electrostatic Comb-drive Actuators with Modelica

For rapid system-level modeling and simulation of MEMS, a method with Modelica for modeling and simulation of electrostatic comb-drive actuators is proposed. The non-causal and object-oriented modeling methods are analyzed. Then a non-causal object-oriented model of the actuator with Modelica is established based on original equations instead of assignment statements. The results of numerical simulation and theoretical verification show that this model can achieve higher efficiency and precision and that Modelica is well suited for modeling and simulation of MEMS.