DocumentCode
2300977
Title
Reduced surface roughness with improved imprinting technique for polymer optical components
Author
Xiaohui Lin ; Hosseini, Amir ; Wang, Alan X. ; Chen, Ray T.
Author_Institution
Dept. Electr. & Comput. Eng., Univ. of Texas at Austin, Austin, TX, USA
fYear
2012
fDate
23-27 Sept. 2012
Firstpage
280
Lastpage
281
Abstract
We demonstrate a molding process to imprint optical components on polymer. The hard mold is fabricated by either evaporation or electroplating. The roughness of molded polymer surface is reduced by 5nm compared to those fabricated by ion-etching.
Keywords
optical elements; optical fabrication; optical polymers; sputter etching; surface roughness; electroplating; evaporation; hard mold; imprinting technique; ion-etching; molded polymer surface; molding process; polymer optical components; reduced surface roughness; Fabrication; Optical surface waves; Polymers; Rough surfaces; Surface roughness; Surface treatment; Surface waves; electron-beam evaporation; electroplating; molding; polymer waveguide; surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2012 IEEE
Conference_Location
Burlingame, CA
Print_ISBN
978-1-4577-0731-5
Type
conf
DOI
10.1109/IPCon.2012.6358601
Filename
6358601
Link To Document