Title :
Engineered plasmonic nanoantenna arrays with nanostencil lithography
Author :
Aksu, Serap ; Yanik, Ahmet A. ; Adato, Ronen ; Artar, Alp ; Huang, Min ; Altug, Hatice
Author_Institution :
Mater. Sci. & Eng., Boston Univ., Boston, MA, USA
Abstract :
We demonstrate a novel approach for high-throughput and high-resolution fabrication of engineered infrared plasmonic antenna arrays with reusable nanostencils. Optical responses of these plasmonic antennas are comparable to that of arrays fabricated by electron-beam lithography.
Keywords :
antenna arrays; electron beam lithography; nanolithography; nanophotonics; optical fabrication; plasmonics; electron beam lithography; engineered plasmonic nanoantenna arrays; high-resolution fabrication; high-throughput fabrication; nanostencil lithography; optical responses;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698768
