Title :
Optomechanical transduction of a cantilever probe using a high-Q Si microdisk cavity
Author :
Srinivasan, Kartik ; Miao, Houxun ; Rakher, Matthew T. ; Davanço, Marcelo ; Aksyuk, Vladimir
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
Optomechanical transduction of a silicon cantilever probe intended for atomic force microscopy applications is achieved through gradient force coupling to a high quality factor microdisk cavity, with an estimated displacement sensitivity of ≈3×10-15 m/√(Hz).
Keywords :
Q-factor; atomic force microscopy; cantilevers; micro-optomechanical devices; microcavities; optical couplers; semiconductor devices; silicon; transducers; Si; atomic force microscopy; displacement sensitivity; gradient force coupling; high quality factor microdisk cavity; optomechanical transduction; silicon cantilever probe;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698825
