Title :
Theoretical Studies Of Plasma Ion Implantation
Author :
Jae Koo Lee ; Sang June Hahn
Author_Institution :
Pohang Institute of Science & Technology
Keywords :
Deuterium; Ion implantation; Neutrons; Nuclear and plasma sciences; Plasma applications; Plasma devices; Plasma immersion ion implantation; Plasma materials processing; Plasma sheaths; Plasma sources;
Conference_Titel :
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location :
Williamsburg, VA, USA
Print_ISBN :
0-7803-0147-1
DOI :
10.1109/PLASMA.1991.695537
