Title :
Low-loss Si-slot waveguides and ring resonator embedded with Benzocyclobutene
Author :
Atsumi, Yuki ; Kang, Joonhyun ; Maeda, Yasuna ; Oda, Manabu ; Nishiyama, Nobuhiko ; Arai, Shigehisa
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Tokyo, Japan
Abstract :
In order to improve the property of the athermal ring resonator with Si-slot waveguide, a reduction of the propagation loss of a slot waveguide and introduction of a spot-size converter are reported. The propagation loss was measured to be 5.6 dB/cm, which is the lowest value to the best of our knowledge.
Keywords :
elemental semiconductors; integrated optics; optical losses; optical resonators; optical waveguides; organic compounds; silicon; Si; benzocyclobutene; embedded ring resonator; low-loss Si-slot waveguides; propagation loss; spot-size converter;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698844
