DocumentCode :
2302711
Title :
Silicon-based integrated hollow waveguides produced by controlled thin film buckling
Author :
Epp, Eric ; Ponnampalam, N. ; Newman, W. ; Drobot, B. ; McFarlane, S. ; McMullin, J.N. ; Meldrum, A. ; DeCorby, R.G.
Author_Institution :
Electr. & Comput. Eng., Univ. of Alberta, Edmonton, AB, Canada
fYear :
2010
fDate :
7-11 Nov. 2010
Firstpage :
258
Lastpage :
259
Abstract :
We describe planar air-core waveguides with Bragg reflector claddings, fabricated by controlled delamination and buckling of sputtered Si/SiO2 multilayers. We also report preliminary light guiding experiments in the 1550 nm wavelength range.
Keywords :
Bragg gratings; buckling; claddings; delamination; elemental semiconductors; optical fabrication; optical multilayers; optical planar waveguides; silicon; silicon compounds; Bragg reflector claddings; Si-SiO2; buckling; controlled thin film buckling; delamination; light guiding; planar air-core waveguides; silicon-based integrated hollow waveguides; sputtered multilayers; wavelength 1550 nm; Hollow Waveguide; Self Assembly;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
ISSN :
-
Print_ISBN :
978-1-4244-5368-9
Electronic_ISBN :
-
Type :
conf
DOI :
10.1109/PHOTONICS.2010.5698857
Filename :
5698857
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2302711
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