DocumentCode
2303020
Title
Photonic Integration of nano-electro-mechanical systems
Author
Li, Mo ; Pernice, Wolfram ; Tang, Hong
Author_Institution
Dept. of Electr. & Eng., Yale Univ., New Haven, CT, USA
fYear
2010
fDate
7-11 Nov. 2010
Firstpage
291
Lastpage
292
Abstract
A brand new photonic platform for nanomechanical systems integration is proposed . We are able to overcome all these difficulties of current NEMS by harnessing optical force for device transduction and using integrated photonic circuit for interconnects.
Keywords
integrated optics; nanoelectromechanical devices; nanophotonics; device transduction; integrated photonic circuit; nano-electro-mechanical systems; optical force; photonic integration; NEMS; gradient optical force; nanophotonics; optomechanics; photonic cantilever;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location
Denver, CO
ISSN
-
Print_ISBN
978-1-4244-5368-9
Electronic_ISBN
-
Type
conf
DOI
10.1109/PHOTONICS.2010.5698874
Filename
5698874
Link To Document