• DocumentCode
    2303074
  • Title

    Silicon Nitride Thin Film Deposition Using ECR Plasma

  • Author

    Sun-Kyu Song ; Hong-Young Chang

  • Author_Institution
    Physics Department, KAIST
  • fYear
    1991
  • fDate
    3-5 June 1991
  • Firstpage
    120
  • Lastpage
    120
  • Keywords
    Magnetic films; Nuclear and plasma sciences; Plasma applications; Plasma chemistry; Plasma properties; Plasma sources; Plasma temperature; Plasma transport processes; Silicon; Sputtering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
  • Conference_Location
    Williamsburg, VA, USA
  • Print_ISBN
    0-7803-0147-1
  • Type

    conf

  • DOI
    10.1109/PLASMA.1991.695541
  • Filename
    695541
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2303074