Title :
High-performance oxide TFTs based on solution-processed ZTO
Author :
Hu, Ching-Chien ; Wu, Cheng-Han ; Chien, Chih-Wei ; Kung, Yen-Cheng ; Chang, Feng-Ming ; Hsu, Po-Ching ; Liao, Chia-Hsin ; Shiuan-Iou Lin ; Wu, Chung-Chih
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
Thin-film transistors (TFTs) based on solution-processed Zinc-Tin oxides (ZTO) of different Zn:Sn compositions are investigated. The solution-processed ZTO TFTs show rather high device performances, with the mobility up to 15 cm2/V-s, the on/off ratio up to 106~107 and a subthreshold slope <;0.6 V/decade.
Keywords :
liquid phase deposition; semiconductor materials; thin film transistors; tin compounds; zinc compounds; ZnSnO; carrier mobility; high-performance oxide TFT; on-off ratio; solution-processed zinc-tin oxides; thin-film transistors;
Conference_Titel :
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-5368-9
DOI :
10.1109/PHOTONICS.2010.5698884