• DocumentCode
    2303183
  • Title

    High-performance oxide TFTs based on solution-processed ZTO

  • Author

    Hu, Ching-Chien ; Wu, Cheng-Han ; Chien, Chih-Wei ; Kung, Yen-Cheng ; Chang, Feng-Ming ; Hsu, Po-Ching ; Liao, Chia-Hsin ; Shiuan-Iou Lin ; Wu, Chung-Chih

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    311
  • Lastpage
    312
  • Abstract
    Thin-film transistors (TFTs) based on solution-processed Zinc-Tin oxides (ZTO) of different Zn:Sn compositions are investigated. The solution-processed ZTO TFTs show rather high device performances, with the mobility up to 15 cm2/V-s, the on/off ratio up to 106~107 and a subthreshold slope <;0.6 V/decade.
  • Keywords
    liquid phase deposition; semiconductor materials; thin film transistors; tin compounds; zinc compounds; ZnSnO; carrier mobility; high-performance oxide TFT; on-off ratio; solution-processed zinc-tin oxides; thin-film transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698884
  • Filename
    5698884