DocumentCode
2303183
Title
High-performance oxide TFTs based on solution-processed ZTO
Author
Hu, Ching-Chien ; Wu, Cheng-Han ; Chien, Chih-Wei ; Kung, Yen-Cheng ; Chang, Feng-Ming ; Hsu, Po-Ching ; Liao, Chia-Hsin ; Shiuan-Iou Lin ; Wu, Chung-Chih
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2010
fDate
7-11 Nov. 2010
Firstpage
311
Lastpage
312
Abstract
Thin-film transistors (TFTs) based on solution-processed Zinc-Tin oxides (ZTO) of different Zn:Sn compositions are investigated. The solution-processed ZTO TFTs show rather high device performances, with the mobility up to 15 cm2/V-s, the on/off ratio up to 106~107 and a subthreshold slope <;0.6 V/decade.
Keywords
liquid phase deposition; semiconductor materials; thin film transistors; tin compounds; zinc compounds; ZnSnO; carrier mobility; high-performance oxide TFT; on-off ratio; solution-processed zinc-tin oxides; thin-film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
IEEE Photonics Society, 2010 23rd Annual Meeting of the
Conference_Location
Denver, CO
ISSN
-
Print_ISBN
978-1-4244-5368-9
Electronic_ISBN
-
Type
conf
DOI
10.1109/PHOTONICS.2010.5698884
Filename
5698884
Link To Document