• DocumentCode
    2303581
  • Title

    Photonic temperature sensor based on an active silicon resonator manufactured using a CMOS process

  • Author

    Kim, Gun-Duk ; Lee, Hak-Soon ; Kim, Woo-Ju ; Lee, Sang-Shin ; Lim, Boo Tak ; Bae, Hee Kyung ; Lee, Wan-Gyu

  • Author_Institution
    Dept. of Electron. Eng., Kwangwoon Univ., Seoul, South Korea
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    353
  • Lastpage
    354
  • Abstract
    A photonic temperature sensor based on an active silicon CMOS resonator was proposed and built. It features a simple measurement scheme, a high sensitivity and a wide operation range.
  • Keywords
    CMOS integrated circuits; elemental semiconductors; integrated optics; optical resonators; optical sensors; silicon; temperature sensors; CMOS process; Si; active silicon resonator; photonic temperature sensor; silicon photonic devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698905
  • Filename
    5698905