DocumentCode
2304142
Title
Simulation Of Potentials Created by particulates in RF discharges: residence at the sheath edges
Author
Tsung, F. ; Trulsen, I. ; Vahedi, V. ; Birdsall, C.K.
Author_Institution
Univ. of Calif.
fYear
1991
fDate
3-5 June 1991
Firstpage
122
Lastpage
122
Keywords
Atmospheric modeling; Electrons; Inductors; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma simulation; Plasma temperature; Radio frequency; Semiconductor process modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695547
Filename
695547
Link To Document