Modeling and characterization of a MEMS synchronous generator

This paper addresses the modeling of a three-phase electromagnetic MEMS generator. First, the differential non-linear equations that govern the electrical and mechanical dynamics are derived. An existing device is taken as a case study, and different strategies (analytical calculation, FE analysis or direct measurement) are used in order to obtain its characteristic parameters, which are then introduced into the model. Finally, the system is simulated under different operating conditions, and the results are compared to the measurements. The experimental data are in good agreement with the theoretical predictions (discrepancy below 6%).