DocumentCode :
230464
Title :
Process technology scaling in an increasingly interconnect dominated world
Author :
Clarke, James S. ; George, Cijo ; Jezewski, Christopher ; Caro, Arantxa Maestre ; Michalak, D. ; Torres, Juana
Author_Institution :
Components Res., Intel Corp., Hillsboro, OR, USA
fYear :
2014
fDate :
9-12 June 2014
Firstpage :
1
Lastpage :
2
Abstract :
The RC delay and power restrictions imposed by the interconnect system can contribute to poor circuit performance in an increasingly severe manner as dimensions shrink. Resistances are increasing faster than the scale factor of the technology and capacitance improvements are constrained by mechanical requirements of the assembled stack. Collectively, these cause a bottleneck in both local and global information transfer on a chip. Novel deposition methods and novel conductor materials are being explored as means to increase conductive cross sectional area. Molecular ordering is an opportunity to simultaneously deliver capacitance and mechanical strength. Despite these improvement paths, a more holistic approach to interconnect design is needed, where the application and micro architecture are more tolerant of RC scaling constraints.
Keywords :
delay circuits; integrated circuit interconnections; scaling circuits; RC delay; RC scaling constraints; assembled stack; capacitance improvements; circuit performance; conductive cross sectional area; conductor materials; deposition methods; global information transfer; increasingly interconnect dominated world; local information transfer; mechanical requirements; microarchitecture; molecular ordering; power restrictions; process technology scaling; technology improvements; Capacitance; Copper; Films; Integrated circuit interconnections; Resistance; Wires; Interconnect scaling; RC delay; capacitance; power; resistance;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on
Conference_Location :
Honolulu, HI
ISSN :
0743-1562
Print_ISBN :
978-1-4799-3331-0
Type :
conf
DOI :
10.1109/VLSIT.2014.6894407
Filename :
6894407
Link To Document :
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