DocumentCode
230464
Title
Process technology scaling in an increasingly interconnect dominated world
Author
Clarke, James S. ; George, Cijo ; Jezewski, Christopher ; Caro, Arantxa Maestre ; Michalak, D. ; Torres, Juana
Author_Institution
Components Res., Intel Corp., Hillsboro, OR, USA
fYear
2014
fDate
9-12 June 2014
Firstpage
1
Lastpage
2
Abstract
The RC delay and power restrictions imposed by the interconnect system can contribute to poor circuit performance in an increasingly severe manner as dimensions shrink. Resistances are increasing faster than the scale factor of the technology and capacitance improvements are constrained by mechanical requirements of the assembled stack. Collectively, these cause a bottleneck in both local and global information transfer on a chip. Novel deposition methods and novel conductor materials are being explored as means to increase conductive cross sectional area. Molecular ordering is an opportunity to simultaneously deliver capacitance and mechanical strength. Despite these improvement paths, a more holistic approach to interconnect design is needed, where the application and micro architecture are more tolerant of RC scaling constraints.
Keywords
delay circuits; integrated circuit interconnections; scaling circuits; RC delay; RC scaling constraints; assembled stack; capacitance improvements; circuit performance; conductive cross sectional area; conductor materials; deposition methods; global information transfer; increasingly interconnect dominated world; local information transfer; mechanical requirements; microarchitecture; molecular ordering; power restrictions; process technology scaling; technology improvements; Capacitance; Copper; Films; Integrated circuit interconnections; Resistance; Wires; Interconnect scaling; RC delay; capacitance; power; resistance;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology (VLSI-Technology): Digest of Technical Papers, 2014 Symposium on
Conference_Location
Honolulu, HI
ISSN
0743-1562
Print_ISBN
978-1-4799-3331-0
Type
conf
DOI
10.1109/VLSIT.2014.6894407
Filename
6894407
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