A concept of fully integrated MEMS-type electron microscope

Author

Krysztof, M. ; Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, J.

Author_Institution

Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland

fYear

2014

fDate

6-10 July 2014

Firstpage

77

Lastpage

78

Abstract

In this article a concept of the fully, on-a-chip, integrated MEMS electron microscope and high vacuum MEMS micropump is discussed. The device is formed as a multilayer sandwich of anodically bonded glass/silicon part. The “active” part contains field emitting CNT electron source with proper configuration of electrodes forming an electron beam. Electron beam hits a thin membrane, passes through sample, and generates signal on a detector placed outside a high vacuum region.

Keywords

carbon nanotubes; electron beams; electron microscopes; electron sources; elemental semiconductors; field emission; micropumps; multilayers; silicon; C; Si; active part; anodically bonded glass-silicon part; electrodes; electron beam; field emitting CNT electron source; fully integrated MEMS-type electron microscope; high vacuum MEMS micropump; multilayer sandwich; on-a-chip MEMS electron microscope; thin membrane; Biomembranes; Electrodes; Electron beams; Scanning electron microscopy; Silicon; MEMS; electron microscopy; micropump; miniaturization;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2014 27th International

Conference_Location

Engelberg

Print_ISBN

978-1-4799-5306-6

Type

conf

DOI

10.1109/IVNC.2014.6894767

Filename

6894767