Title :
A concept of fully integrated MEMS-type electron microscope
Author :
Krysztof, M. ; Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, J.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
In this article a concept of the fully, on-a-chip, integrated MEMS electron microscope and high vacuum MEMS micropump is discussed. The device is formed as a multilayer sandwich of anodically bonded glass/silicon part. The “active” part contains field emitting CNT electron source with proper configuration of electrodes forming an electron beam. Electron beam hits a thin membrane, passes through sample, and generates signal on a detector placed outside a high vacuum region.
Keywords :
carbon nanotubes; electron beams; electron microscopes; electron sources; elemental semiconductors; field emission; micropumps; multilayers; silicon; C; Si; active part; anodically bonded glass-silicon part; electrodes; electron beam; field emitting CNT electron source; fully integrated MEMS-type electron microscope; high vacuum MEMS micropump; multilayer sandwich; on-a-chip MEMS electron microscope; thin membrane; Biomembranes; Electrodes; Electron beams; Scanning electron microscopy; Silicon; MEMS; electron microscopy; micropump; miniaturization;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location :
Engelberg
Print_ISBN :
978-1-4799-5306-6
DOI :
10.1109/IVNC.2014.6894767
