Title :
Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Author :
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A. ; Maamari, Khodr ; An, Sanghyuk ; Dankovic, Tatjana ; Feinerman, Alan ; Busta, Heinz
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wrocław, Poland
Abstract :
This paper describes the use of a miniature Pirani pressure sensor to measure the properties of a miniature vacuum pump. The construction and fabrication process of the integrated device is presented. Results of characterization of both MEMS devices performed separately in reference vacuum system and after their integration are shown.
Keywords :
micropumps; microsensors; pressure measurement; pressure sensors; vacuum pumps; MEMS devices; MEMS-type Pirani pressure gauge; MEMS-type vacuum pump; miniature Pirani pressure sensor; miniature vacuum pump; reference vacuum system; Containers; Micropumps; Performance evaluation; on-chip integration; vacuum micropump; vacuum microsensor;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location :
Engelberg
Print_ISBN :
978-1-4799-5306-6
DOI :
10.1109/IVNC.2014.6894811
