Title :
Vertical MEMS-type field-emission electron source
Author :
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
Abstract :
The paper describes a MEMS-type field emission electron source fabricated as a multilayer silicon-glass structure, which can be a part of other miniature vacuum devices. Here, emission properties obtained in 2-and 3-electrode configuration have been reported.
Keywords :
electrodes; electron field emission; electron sources; elemental semiconductors; glass structure; micromechanical devices; multilayers; silicon; 2-electrode configuration; 3-electrode configuration; Si; emission properties; field-emission electron source; miniature vacuum devices; multilayer silicon-glass structure; vertical MEMS-type electron source; Anodes; Cathodes; Fabrication; Silicon; MEMS; field emission; vacuum housing;
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location :
Engelberg
Print_ISBN :
978-1-4799-5306-6
DOI :
10.1109/IVNC.2014.6894812
