DocumentCode
230723
Title
Vertical MEMS-type field-emission electron source
Author
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A.
Author_Institution
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
fYear
2014
fDate
6-10 July 2014
Firstpage
208
Lastpage
209
Abstract
The paper describes a MEMS-type field emission electron source fabricated as a multilayer silicon-glass structure, which can be a part of other miniature vacuum devices. Here, emission properties obtained in 2-and 3-electrode configuration have been reported.
Keywords
electrodes; electron field emission; electron sources; elemental semiconductors; glass structure; micromechanical devices; multilayers; silicon; 2-electrode configuration; 3-electrode configuration; Si; emission properties; field-emission electron source; miniature vacuum devices; multilayer silicon-glass structure; vertical MEMS-type electron source; Anodes; Cathodes; Fabrication; Silicon; MEMS; field emission; vacuum housing;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2014 27th International
Conference_Location
Engelberg
Print_ISBN
978-1-4799-5306-6
Type
conf
DOI
10.1109/IVNC.2014.6894812
Filename
6894812
Link To Document