• DocumentCode
    2307409
  • Title

    Polyimides with reduced dielectric anisotropy

  • Author

    Labadie, J.W. ; Lee, H. ; Boese, D. ; Yoon, D. ; Volksen, W. ; Brock, P. ; Cheng, Y. ; Ree, M. ; Chen, K.R.

  • Author_Institution
    IBM Res. Div., Almaden Res. Center, San Jose, CA, USA
  • fYear
    1993
  • fDate
    1-4 Jun 1993
  • Firstpage
    327
  • Lastpage
    329
  • Abstract
    Ordered polyimides have been the subject of considerable interest for thin film applications due to their excellent balance of final properties, however, these polyimides have been shown to have an exceptionally large dielectric anisotropy. Two approaches were examined as a means of obtaining materials with lowered dielectric anisotropies. ATR spectroscopy was used to measure in-plane and out-of-plane refractive indices from which the directional dielectric constant was estimated. In one case, monomers based on hexafluoroisopropylidine were introduced into PMDA at levels ⩽20 mole%. This afforded some reduction in the in-plane dielectric constant. A more promising approach involved the use of polyimides derived from 2,2´-bis(trifluoromethyl)benzidine (BTFB). The PMDA-BTFB polyimide displayed the best combination of properties, including an estimated in-plane dielectric constant of 2.9 and an out-of-plane dielectric constant of 2.6 at 1 MHz
  • Keywords
    dielectric thin films; packaging; permittivity; polymer films; refractive index measurement; 1 MHz; 2,2´-bis(trifluoromethyl)benzidine; ATR spectroscopy; PMDA-BTFB polyimide; attenuated total reflectance; dielectric anisotropy; directional dielectric constant; interlayer dielectrics; ordered polyimides; refractive indices; thin film packaging applications; Anisotropic magnetoresistance; Conducting materials; Dielectric constant; Dielectric materials; Dielectric thin films; Optical films; Optical filters; Optical refraction; Polyimides; Polymer films;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference, 1993. Proceedings., 43rd
  • Conference_Location
    Orlando, FL
  • Print_ISBN
    0-7803-0794-1
  • Type

    conf

  • DOI
    10.1109/ECTC.1993.346825
  • Filename
    346825