DocumentCode
2308380
Title
The Future Of Plasma Processing in Microelectronic Fabrication
Author
Herb, S.K.
Author_Institution
AT&T Bell Laboratories
fYear
1991
fDate
3-5 June 1991
Firstpage
133
Lastpage
133
Keywords
Environmental economics; Fabrication; Fuel economy; Legislation; Microelectronics; Plasma applications; Plasma devices; Plasma materials processing; Power generation economics; Proposals;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695577
Filename
695577
Link To Document