DocumentCode
2308533
Title
The Ion Distribution Function in Weakly Collisional Sheaths
Author
Hamaguchi, S. ; Dalvie, M. ; Farouki, R.T.
Author_Institution
IBM
fYear
1991
fDate
3-5 June 1991
Firstpage
137
Lastpage
138
Keywords
Distribution functions; Etching; Fabrication; Plasma applications; Plasma density; Plasma devices; Plasma materials processing; Plasma properties; Plasma sheaths; Plasma simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695587
Filename
695587
Link To Document