DocumentCode

2308545

Title

Flux Integration In 2D vs. 3D in Feature Evolution Models of Plasma Processing

Author

Dalvie, M. ; Farouki, R.T. ; Hainaguchi, S.

Author_Institution

IBM Thomas J. Watson Research Center

fYear

1991

fDate

3-5 June 1991

Firstpage

138

Lastpage

138

Keywords

Electrons; Equations; Etching; Fabrication; Plasma applications; Plasma materials processing; Plasma sheaths; Plasma simulation; Shadow mapping; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on

Conference_Location

Williamsburg, VA, USA

Print_ISBN

0-7803-0147-1

Type

conf

DOI

10.1109/PLASMA.1991.695588

Filename

695588