Terahertz microsensor for biomedical applications

Author

Perenzoni, Matteo ; Perenzoni, Daniele ; Stoppa, David ; Mulloni, Viviana ; Solazzi, Francesco ; Resta, Giuseppe ; Margesin, Benno

Author_Institution

Center for Mater. & Microsyst., Fondazione Bruno Kessler, Trento, Italy

fYear

2011

fDate

8-10 June 2011

Firstpage

1

Lastpage

3

Abstract

A low-cost integrated microsensor for biomedical applications is proposed. It is composed by an antenna-coupled microbolometer as detector, which is coupled to a specifically designed integrated circuit for biasing and readout. The main features are fast response to radiation, device level reference sensor, and electronic time-correlation for pulsed sources. The detector and the integrated circuits have been fabricated in a custom MEMS technology and a standard CMOS technology, respectively. First electrical measurements show properly operating devices.

Keywords

CMOS integrated circuits; bioMEMS; biomedical electronics; biomedical equipment; microfabrication; microsensors; readout electronics; antenna-coupled microbolometer; biasing; biomedical applications; custom MEMS technology; detector; device level reference sensor; electrical measurements; electronic time-correlation; integrated circuit; low-cost integrated microsensor; pulsed sources; readout; standard CMOS technology; Antennas; Bolometers; Detectors; Fabrication; Integrated circuits; Microsensors; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

BioPhotonics, 2011 International Workshop on

Conference_Location

Parma

Print_ISBN

978-1-4244-9836-9

Electronic_ISBN

978-1-4244-9835-2

Type

conf

DOI

10.1109/IWBP.2011.5954813

Filename

5954813